||He was born in Aichi, Japan, on September 6,1954. He received the B.E. degree in electrical and electronic engineering from Meijo University, Aichi, in 1977. In 1977, he joined institute of plasma physics at Nagoya University, Nagoya, Japan, where he engaged in development and design of high density plasma source. Since 1986, he has been with Faculty of Engineering at Nagoya University. His research interests are nano structure devices, and application of processing plasmas.
He is a member of the Japan Society of Applied Physics.